Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627263 | Film forming apparatus and film forming method | Takahiro Kitano, Masami Akimoto, Kazuhiro Takeshita | 2003-09-30 |
| 6616760 | Film forming unit | Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more | 2003-09-09 |
| 6605153 | Coating film forming apparatus | Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more | 2003-08-12 |
| 6599366 | Substrate processing unit and processing method | Takahiro Kitano, Shinji Kobayashi, Yukihiko Esaki | 2003-07-29 |
| 6537373 | Method of forming film and apparatus thereof | Takahiro Kitano, Shinji Kobayashi, Yukihiko Esaki | 2003-03-25 |
| 6514344 | Film forming unit | Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more | 2003-02-04 |