NK

Norihisa Koga

TL Tokyo Electron Limited: 3 patents #21 of 380Top 6%
Overall (2003): #24,196 of 273,478Top 9%
3
Patents 2003

Issued Patents 2003

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6616760 Film forming unit Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more 2003-09-09
6605153 Coating film forming apparatus Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more 2003-08-12
6514344 Film forming unit Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more 2003-02-04