Issued Patents 2003
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671047 | Combination thermal wave and optical spectroscopy measurement systems | Minna Hovinen | 2003-12-30 |
| 6665071 | Method for determining ion concentration and energy of shallow junction implants | Minna Hovinen | 2003-12-16 |
| 6654131 | Critical dimension analysis with simultaneous multiple angle of incidence measurements | Allan Rosencwaig | 2003-11-25 |
| 6650415 | Broadband spectroscopic rotating compensator ellipsometer | David E. Aspnes | 2003-11-18 |
| 6643354 | Calibration and alignment of X-ray reflectometric systems | Louis N. Koppel, Craig E. Uhrich | 2003-11-04 |
| 6608689 | Combination thin-film stress and thickness measurement device | Lanhua Wei, Allan Rosencwaig | 2003-08-19 |
| 6583875 | Monitoring temperature and sample characteristics using a rotating compensator ellipsometer | Lanhua Wei, Allan Rosencwaig | 2003-06-24 |
| 6583876 | Apparatus for optical measurements of nitrogen concentration in thin films | Youxian Wen | 2003-06-24 |
| 6577384 | Spatial averaging technique for ellipsometry and reflectometry | Lanhua Wei, Hanyou Chu | 2003-06-10 |
| 6567213 | Apparatus for analyzing multi-layer thin film stacks on semiconductors | Allan Rosencwaig | 2003-05-20 |
| 6535285 | Combination thermal wave and optical spectroscopy measurement system | Minna Hovinen | 2003-03-18 |
| 6532070 | Method for determining ion concentration and energy of shallow junction implants | Minna Hovinen | 2003-03-11 |
| 6522413 | Apparatus for evaluating metalized layers on semiconductors | Li-Yi Chen | 2003-02-18 |
| 6515746 | Thin film optical measurement system and method with calibrating ellipsometer | Jeffrey T. Fanton, Craig E. Uhrich | 2003-02-04 |
| 6512815 | Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements | Allan Rosencwaig | 2003-01-28 |