Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6608689 | Combination thin-film stress and thickness measurement device | Jon Opsal, Allan Rosencwaig | 2003-08-19 |
| 6583875 | Monitoring temperature and sample characteristics using a rotating compensator ellipsometer | Jon Opsal, Allan Rosencwaig | 2003-06-24 |
| 6577384 | Spatial averaging technique for ellipsometry and reflectometry | Hanyou Chu, Jon Opsal | 2003-06-10 |
| 6515744 | Small spot ellipsometer | — | 2003-02-04 |
| 6509199 | Spatial averaging technique for ellipsometry and reflectometry | — | 2003-01-21 |