Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654131 | Critical dimension analysis with simultaneous multiple angle of incidence measurements | Jon Opsal | 2003-11-25 |
| 6608689 | Combination thin-film stress and thickness measurement device | Lanhua Wei, Jon Opsal | 2003-08-19 |
| 6583875 | Monitoring temperature and sample characteristics using a rotating compensator ellipsometer | Lanhua Wei, Jon Opsal | 2003-06-24 |
| 6567213 | Apparatus for analyzing multi-layer thin film stacks on semiconductors | Jon Opsal | 2003-05-20 |
| 6512815 | Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements | Jon Opsal | 2003-01-28 |