Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643354 | Calibration and alignment of X-ray reflectometric systems | Louis N. Koppel, Jon Opsal | 2003-11-04 |
| 6515746 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Jeffrey T. Fanton | 2003-02-04 |