Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559049 | All dual damascene oxide etch process steps in one confined plasma chamber | Lawrence Shao-hsien Chen, Young-Tong Tsai, Francis Ko, Chuan-Kai Lo | 2003-05-06 |
CC
Chang-Tai Chiao
Overall (2003): #251,221 of 273,478Top 95%
1
Patents 2003