Lawrence Shao-hsien Chen

Lam Research: 1 patents #78 of 202Top 40%

📍 Shanghai, WA: #4 of 10 inventorsTop 40%

Overall (2003): #174,248 of 273,478Top 65%

Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6559049	All dual damascene oxide etch process steps in one confined plasma chamber	Chang-Tai Chiao, Young-Tong Tsai, Francis Ko, Chuan-Kai Lo	2003-05-06