Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559049 | All dual damascene oxide etch process steps in one confined plasma chamber | Lawrence Shao-hsien Chen, Chang-Tai Chiao, Francis Ko, Chuan-Kai Lo | 2003-05-06 |
YT
Young-Tong Tsai
Overall (2003): #85,384 of 273,478Top 35%
1
Patents 2003