CL

Chuan-Kai Lo

Lam Research: 1 patents #78 of 202Top 40%
📍 Baoshan, TW: #83 of 319 inventorsTop 30%
Overall (2003): #248,867 of 273,478Top 95%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6559049 All dual damascene oxide etch process steps in one confined plasma chamber Lawrence Shao-hsien Chen, Chang-Tai Chiao, Young-Tong Tsai, Francis Ko 2003-05-06