Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671489 | Thermal fixing apparatus | Hirohiko Nakata | 2003-12-30 |
| 6664515 | Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern | Masashi Narita, Hirohiko Nakata, Akira Kuibira | 2003-12-16 |
| 6653604 | Heater member for mounting heating object and substrate processing apparatus using the same | Hirohiko Nakata, Akira Kuibira, Kenji Shinma | 2003-11-25 |
| 6548787 | Ceramic heater | Hirohiko Nakata, Syunji Nagao | 2003-04-15 |
| 6508884 | Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus | Akira Kuibira, Hirohiko Nakata, Kenjiro Higaki, Takashi Ishii, Yasuyuki Matsui | 2003-01-21 |