Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671489 | Thermal fixing apparatus | Masuhiro Natsuhara | 2003-12-30 |
| 6664515 | Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern | Masuhiro Natsuhara, Masashi Narita, Akira Kuibira | 2003-12-16 |
| 6653604 | Heater member for mounting heating object and substrate processing apparatus using the same | Masuhiro Natsuhara, Akira Kuibira, Kenji Shinma | 2003-11-25 |
| 6569524 | High thermal conductivity composite material, and method for producing the same | Chihiro Kawai | 2003-05-27 |
| 6554906 | Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same | Akira Kuibira | 2003-04-29 |
| 6548787 | Ceramic heater | Masuhiro Natsuhara, Syunji Nagao | 2003-04-15 |
| 6508884 | Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus | Akira Kuibira, Kenjiro Higaki, Masuhiro Natsuhara, Takashi Ishii, Yasuyuki Matsui | 2003-01-21 |