Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6508884 | Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus | Akira Kuibira, Hirohiko Nakata, Masuhiro Natsuhara, Takashi Ishii, Yasuyuki Matsui | 2003-01-21 |