Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664515 | Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern | Masuhiro Natsuhara, Masashi Narita, Hirohiko Nakata | 2003-12-16 |
| 6653604 | Heater member for mounting heating object and substrate processing apparatus using the same | Masuhiro Natsuhara, Hirohiko Nakata, Kenji Shinma | 2003-11-25 |
| 6554906 | Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same | Hirohiko Nakata | 2003-04-29 |
| 6508884 | Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus | Hirohiko Nakata, Kenjiro Higaki, Masuhiro Natsuhara, Takashi Ishii, Yasuyuki Matsui | 2003-01-21 |