Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653604 | Heater member for mounting heating object and substrate processing apparatus using the same | Masuhiro Natsuhara, Hirohiko Nakata, Akira Kuibira | 2003-11-25 |
| 6599034 | Sealed airtight container for optical-semiconductors and optical-semiconductors module | Nobuyoshi Tatoh, Koji Nishi | 2003-07-29 |