Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6548035 | Silicon single crystal wafer for epitaxial wafer, epitaxial wafer, and methods for producing the same and evaluating the same | Akihiro Kimura, Makoto Iida, Ken Aihara, Masanori Kimura | 2003-04-15 |
| 6544332 | Method for manufacturing silicon single crystal, silicon single crystal manufactured by the method, and silicon wafer | Makoto Iida, Masanori Kimura, Hiroshi Takeno | 2003-04-08 |
| 6544656 | Production method for silicon wafer and silicon wafer | Takao Abe, Ken Aihara, Shoji Akiyama, Tetsuya Igarashi, Weifeng QU +1 more | 2003-04-08 |