Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670261 | Production method for annealed wafer | Norihiro Kobayashi, Masaro Tamatsuka, Takatoshi Nagoya | 2003-12-30 |
| 6666265 | Heat exchanger, method of manufacturing the heat exchanger, and method of manufacturing tube for heat exchange | Soichi Kato, Muneo Sakurada, Shin Kurihara, Jun Akaike, Kazuo Ochiai | 2003-12-23 |
| 6645834 | Method for manufacturing annealed wafer and annealed wafer | — | 2003-11-11 |
| 6621972 | Optical waveguides with trench structures | Lionel C. Kimerling, Kazumi Wada, Hermann A. Haus, Milov Popovic | 2003-09-16 |
| 6591900 | Heat exchanger, tube for heat exchanger, and method of manufacturing the heat exchanger and the tube | Soichi Kato, Kazuo Ochiai | 2003-07-15 |
| 6573159 | Method for thermally annealing silicon wafer and silicon wafer | Norihiro Kobayashi, Yuuichi Matsumoto, Masaro Tamatsuka | 2003-06-03 |
| 6544656 | Production method for silicon wafer and silicon wafer | Takao Abe, Ken Aihara, Tetsuya Igarashi, Weifeng QU, Yoshinori Hayamizu +1 more | 2003-04-08 |
| 6538285 | Silicon wafer | Norihiro Kobayashi, Takao Abe | 2003-03-25 |