Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670261 | Production method for annealed wafer | Shoji Akiyama, Masaro Tamatsuka, Takatoshi Nagoya | 2003-12-30 |
| 6573159 | Method for thermally annealing silicon wafer and silicon wafer | Shoji Akiyama, Yuuichi Matsumoto, Masaro Tamatsuka | 2003-06-03 |
| 6551398 | Heat treatment method for a silicon monocrystal wafer and a silicon monocrystal wafer | Takao Abe, Masahiro Kato | 2003-04-22 |
| 6548907 | Semiconductor device having a matrix array of contacts and a fabrication process thereof | Naoto Yamada | 2003-04-15 |
| 6544899 | Process for manufacturing silicon epitaxial wafer | Hiroshi Takeno | 2003-04-08 |
| 6538285 | Silicon wafer | Shoji Akiyama, Takao Abe | 2003-03-25 |
| 6531416 | Method for heat treatment of silicon wafer and silicon wafer heat-treated by the method | Toshihiko Miyano, Satoshi Oka | 2003-03-11 |