Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544332 | Method for manufacturing silicon single crystal, silicon single crystal manufactured by the method, and silicon wafer | Makoto Iida, Masanori Kimura, Yoshinori Hayamizu | 2003-04-08 |
| 6544490 | Silicon wafer and production method thereof and evaluation method for silicon wafer | Hideki Shigeno, Makoto Iida | 2003-04-08 |
| 6544899 | Process for manufacturing silicon epitaxial wafer | Norihiro Kobayashi | 2003-04-08 |