Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670261 | Production method for annealed wafer | Shoji Akiyama, Norihiro Kobayashi, Takatoshi Nagoya | 2003-12-30 |
| 6626994 | Silicon wafer for epitaxial wafer, epitaxial wafer, and method of manufacture thereof | Akihiro Kimura, Hideki Sato, Ryuji Kono, Masahiro Kato | 2003-09-30 |
| 6599603 | Silicon wafer | Masahiro Kato, Osamu Imai, Akihiro Kimura, Tomosuke Yoshida | 2003-07-29 |
| 6573159 | Method for thermally annealing silicon wafer and silicon wafer | Norihiro Kobayashi, Shoji Akiyama, Yuuichi Matsumoto | 2003-06-03 |