Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626994 | Silicon wafer for epitaxial wafer, epitaxial wafer, and method of manufacture thereof | Hideki Sato, Ryuji Kono, Masahiro Kato, Masaro Tamatsuka | 2003-09-30 |
| 6599603 | Silicon wafer | Masahiro Kato, Masaro Tamatsuka, Osamu Imai, Tomosuke Yoshida | 2003-07-29 |
| 6548035 | Silicon single crystal wafer for epitaxial wafer, epitaxial wafer, and methods for producing the same and evaluating the same | Makoto Iida, Yoshinori Hayamizu, Ken Aihara, Masanori Kimura | 2003-04-15 |