Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6548035 | Silicon single crystal wafer for epitaxial wafer, epitaxial wafer, and methods for producing the same and evaluating the same | Akihiro Kimura, Makoto Iida, Yoshinori Hayamizu, Masanori Kimura | 2003-04-15 |
| 6544656 | Production method for silicon wafer and silicon wafer | Takao Abe, Shoji Akiyama, Tetsuya Igarashi, Weifeng QU, Yoshinori Hayamizu +1 more | 2003-04-08 |