Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626994 | Silicon wafer for epitaxial wafer, epitaxial wafer, and method of manufacture thereof | Akihiro Kimura, Hideki Sato, Masahiro Kato, Masaro Tamatsuka | 2003-09-30 |
| 6573112 | Semiconductor device manufacturing method | Akihiko Ariga, Hideyuki Aoki, Hiroyuki Ohta, Yoshishige Endo, Masatoshi Kanamaru +4 more | 2003-06-03 |
| 6511857 | Process for manufacturing semiconductor device | Makoto Kitano, Hideo Miura, Hiroyuki Ota, Yoshishige Endo, Takeshi Harada +5 more | 2003-01-28 |