Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624081 | Enhanced etching/smoothing of dielectric surfaces | Jerald P. Dykstra, Wesley Skinner, Allen R. Kirkpatrick | 2003-09-23 |
| 6612317 | Supercritical fluid delivery and recovery system for semiconductor wafer processing | Michael Costantini, Mohan Chandra, Heiko Moritz, Ijaz Jafri, Rick M. Heathwaite | 2003-09-02 |
| 6602349 | Supercritical fluid cleaning process for precision surfaces | Mohan Chandra, Michael Costantini, Heiko Moritz, Ijaz Jafri, Jim Boyd +1 more | 2003-08-05 |