Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624081 | Enhanced etching/smoothing of dielectric surfaces | Jerald P. Dykstra, David Mount, Allen R. Kirkpatrick | 2003-09-23 |
| 6613240 | Method and apparatus for smoothing thin conductive films by gas cluster ion beam | Allen R. Kirkpatrick | 2003-09-02 |