Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635883 | Gas cluster ion beam low mass ion filter | Richard Torti | 2003-10-21 |
| 6629508 | Ionizer for gas cluster ion beam formation | — | 2003-10-07 |
| 6624081 | Enhanced etching/smoothing of dielectric surfaces | David Mount, Wesley Skinner, Allen R. Kirkpatrick | 2003-09-23 |