Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6612317 | Supercritical fluid delivery and recovery system for semiconductor wafer processing | Michael Costantini, Mohan Chandra, Heiko Moritz, David Mount, Rick M. Heathwaite | 2003-09-02 |
| 6602349 | Supercritical fluid cleaning process for precision surfaces | Mohan Chandra, David Mount, Michael Costantini, Heiko Moritz, Jim Boyd +1 more | 2003-08-05 |
| 6508259 | Inverted pressure vessel with horizontal through loading | James A. Tseronis, Heiko D. Mortiz, Mohan Chandra, Robert B. Farmer, Jonathan A. Talbott | 2003-01-21 |