Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6612317 | Supercritical fluid delivery and recovery system for semiconductor wafer processing | Mohan Chandra, Heiko Moritz, Ijaz Jafri, David Mount, Rick M. Heathwaite | 2003-09-02 |
| 6602349 | Supercritical fluid cleaning process for precision surfaces | Mohan Chandra, David Mount, Heiko Moritz, Ijaz Jafri, Jim Boyd +1 more | 2003-08-05 |