Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6655042 | System and method for drying semiconductor substrate | Hun-Jung Yi, Ki Seok Lee, Bo-yong Lee, Sang-Oh Park, Pil-Kwon Jun +1 more | 2003-12-02 |
| 6589719 | Photoresist stripper compositions | Seung-Hyun Ahn, Hoe-Sik Chung, Mi-sook Jeon, Eun-Mi Bae, Baik-Soon Choi +1 more | 2003-07-08 |
| 6590378 | Real time parameter monitoring apparatus for high voltage chamber in semiconductor wafer processing system | Gyeong-Su Keum, Hyung-Sik Hong | 2003-07-08 |
| 6528333 | Method of and device for detecting micro-scratches | Chung-Sam Jun, Sang-bong Choi, Hyung-Suk Cho, Pil-Sik Hyun, Kyu-Hong Lim +1 more | 2003-03-04 |
| 6515293 | Method and apparatus for detecting thickness of thin layer formed on a wafer | Chung-Sam Jun, Sang-bong Choi, Hyun Suk Cho, Pil-Sik Hyun | 2003-02-04 |
| 6508887 | Resist removing composition and resist removing method using the same | Dong-Jin Park, June-ing Gil, Je-eung Park | 2003-01-21 |
| 6503682 | Photoresist composition, preparation method thereof and method for forming a pattern during semiconductor processing using the photoresist composition | Young-Ho Kim, Hoe-Sik Chung, Boo Sup Lee | 2003-01-07 |