Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650408 | Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus | Kye-Weon Kim, Yu-Sin Yang, Hyo-Hoo Kim | 2003-11-18 |
| 6544802 | Wafer inspection system and method for selectively inspecting conductive pattern defects | Pil-Sik Hyun | 2003-04-08 |
| 6528333 | Method of and device for detecting micro-scratches | Sang-Mun Chon, Sang-bong Choi, Hyung-Suk Cho, Pil-Sik Hyun, Kyu-Hong Lim +1 more | 2003-03-04 |
| 6515293 | Method and apparatus for detecting thickness of thin layer formed on a wafer | Sang-Mun Chon, Sang-bong Choi, Hyun Suk Cho, Pil-Sik Hyun | 2003-02-04 |