Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528333 | Method of and device for detecting micro-scratches | Chung-Sam Jun, Sang-Mun Chon, Hyung-Suk Cho, Pil-Sik Hyun, Kyu-Hong Lim +1 more | 2003-03-04 |
| 6515293 | Method and apparatus for detecting thickness of thin layer formed on a wafer | Chung-Sam Jun, Sang-Mun Chon, Hyun Suk Cho, Pil-Sik Hyun | 2003-02-04 |