Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6590378 | Real time parameter monitoring apparatus for high voltage chamber in semiconductor wafer processing system | Sang-Mun Chon, Gyeong-Su Keum | 2003-07-08 |
| 6537143 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Yun-Sik Yang, Kyung-Dae Kim, Min Gyu Kim | 2003-03-25 |