Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623597 | Focus ring and apparatus for processing a semiconductor wafer comprising the same | Oh-Yeon Han, Guk-Kwang Kim, Byeung-Wook Choi | 2003-09-23 |
| 6537143 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Kyung-Dae Kim, Hyung-Sik Hong, Min Gyu Kim | 2003-03-25 |