Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623597 | Focus ring and apparatus for processing a semiconductor wafer comprising the same | Oh-Yeon Han, Guk-Kwang Kim, Yun-Sik Yang | 2003-09-23 |
BC
Byeung-Wook Choi
Overall (2003): #253,572 of 273,478Top 95%
1
Patents 2003