Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6655042 | System and method for drying semiconductor substrate | Hun-Jung Yi, Ki Seok Lee, Bo-yong Lee, Sang-Oh Park, Pil-Kwon Jun +1 more | 2003-12-02 |
| 6537143 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Yun-Sik Yang, Hyung-Sik Hong, Min Gyu Kim | 2003-03-25 |