Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6586342 | Edge bevel removal of copper from silicon wafers | Steven T. Mayer, Andrew J. McCutcheon | 2003-07-01 |
| 6551487 | Methods and apparatus for controlled-angle wafer immersion | Jonathan D. Reid, Steven T. Mayer, David Craig Smith, Evan E. Patton, Dinesh S. Kalakkad +1 more | 2003-04-22 |