Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551487 | Methods and apparatus for controlled-angle wafer immersion | Jonathan D. Reid, Steven T. Mayer, Seshasayee Varadarajan, Evan E. Patton, Dinesh S. Kalakkad +1 more | 2003-04-22 |