Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649268 | Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member | Norio Komine, Akiko Yoshida, Hiroki Jinbo, Norihisa Yamaguchi | 2003-11-18 |
| 6587181 | Optical system with improved durability for projection exposure apparatus and method for manufacturing optical system for projection exposure apparatus | Hiroki Jinbo | 2003-07-01 |
| 6587262 | UV synthetic silica glass optical member and reduction projection exposure apparatus using the same | Norio Komine, Hiroki Jinbo | 2003-07-01 |
| 6505484 | Forming method of silica glass and forming apparatus thereof | Norio Komine, Hiroki Jinbo | 2003-01-14 |