Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656860 | Synthetic silica glass member, photolithography apparatus and process for producing photolithography apparatus | Akiko Yoshida, Hiroki Jinbo | 2003-12-02 |
| 6649268 | Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member | Seishi Fujiwara, Akiko Yoshida, Hiroki Jinbo, Norihisa Yamaguchi | 2003-11-18 |
| 6587262 | UV synthetic silica glass optical member and reduction projection exposure apparatus using the same | Seishi Fujiwara, Hiroki Jinbo | 2003-07-01 |
| 6518210 | Exposure apparatus including silica glass and method for producing silica glass | Hiroki Jinbo, Hiroyuki Hiraiwa | 2003-02-11 |
| 6505484 | Forming method of silica glass and forming apparatus thereof | Seishi Fujiwara, Hiroki Jinbo | 2003-01-14 |