Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656860 | Synthetic silica glass member, photolithography apparatus and process for producing photolithography apparatus | Norio Komine, Hiroki Jinbo | 2003-12-02 |
| 6649268 | Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member | Norio Komine, Seishi Fujiwara, Hiroki Jinbo, Norihisa Yamaguchi | 2003-11-18 |