Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649268 | Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member | Norio Komine, Seishi Fujiwara, Akiko Yoshida, Hiroki Jinbo | 2003-11-18 |