Issued Patents 2003
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654226 | Thermal low k dielectrics | Charles E. May | 2003-11-25 |
| 6583026 | Process for forming a low k carbon-doped silicon oxide dielectric material on an integrated circuit structure | Ponce Saopraseuth, Hemanshu Bhatt | 2003-06-24 |
| 6576544 | Local interconnect | James R. Hightower, Phonesavanh Saopraseuth | 2003-06-10 |
| 6570221 | Bonding of silicon wafers | — | 2003-05-27 |
| 6566186 | Capacitor with stoichiometrically adjusted dielectric and method of fabricating same | Nabil Mansour, Ponce Saopraseuth | 2003-05-20 |
| 6562700 | Process for removal of resist mask over low k carbon-doped silicon oxide dielectric material of an integrated circuit structure, and removal of residues from via etch and resist mask removal | Sam Gu, David Pritchard, Ponce Saopraseuth, Steve Reder | 2003-05-13 |
| 6562735 | Control of reaction rate in formation of low k carbon-containing silicon oxide dielectric material using organosilane, unsubstituted silane, and hydrogen peroxide reactants | Ponce Saopraseuth | 2003-05-13 |
| 6541383 | Apparatus and method for planarizing the surface of a semiconductor wafer | John Gregory | 2003-04-01 |
| 6528389 | Substrate planarization with a chemical mechanical polishing stop layer | John Gregory | 2003-03-04 |
| 6524926 | Metal-insulator-metal capacitor formed by damascene processes between metal interconnect layers and method of forming same | John Gregory | 2003-02-25 |
| 6522006 | Low dielectric constant material in integrated circuit | Kenneth P. Fuchs, Gayle W. Miller, Samuel C. Gioia | 2003-02-18 |
| 6522005 | Integrated circuit device comprising low dielectric constant material for reduced cross talk | Kenneth P. Fuchs, Gayle W. Miller, Samuel C. Gioia | 2003-02-18 |
| 6504249 | Integrated circuit device with reduced cross talk | Kenneth P. Fuchs, Gayle W. Miller, Samuel C. Gioia | 2003-01-07 |
| 6504250 | Integrated circuit device with reduced cross talk | Kenneth P. Fuchs, Gayle W. Miller, Samuel C. Gioia | 2003-01-07 |
| 6504202 | Interconnect-embedded metal-insulator-metal capacitor | Kenneth P. Fuchs | 2003-01-07 |