Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566268 | Method and apparatus for planarizing a wafer surface of a semiconductor wafer having an elevated portion extending therefrom | — | 2003-05-20 |
| 6541383 | Apparatus and method for planarizing the surface of a semiconductor wafer | Derryl D. J. Allman | 2003-04-01 |
| 6528389 | Substrate planarization with a chemical mechanical polishing stop layer | Derryl D. J. Allman | 2003-03-04 |
| 6524926 | Metal-insulator-metal capacitor formed by damascene processes between metal interconnect layers and method of forming same | Derryl D. J. Allman | 2003-02-25 |