Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654226 | Thermal low k dielectrics | Derryl D. J. Allman | 2003-11-25 |
| 6638776 | Thermal characterization compensation | — | 2003-10-28 |
| 6620729 | Ion beam dual damascene process | — | 2003-09-16 |
| 6566244 | Process for improving mechanical strength of layers of low k dielectric material | Venkatesh P. Gopinath, Peter J. Wright | 2003-05-20 |
| 6560504 | Use of contamination-free manufacturing data in fault detection and classification as well as in run-to-run control | Thomas J. Goodwin, Iraj Emami | 2003-05-06 |
| 6544829 | Polysilicon gate salicidation | Venkatesh P. Gopinath, Mohammad Mirabedini, Arvind Kamath | 2003-04-08 |
| 6531364 | Advanced fabrication technique to form ultra thin gate dielectric using a sacrificial polysilicon seed layer | Mark I. Gardner, H. Jim Fulford | 2003-03-11 |
| 6521520 | Semiconductor wafer arrangement and method of processing a semiconductor wafer | Hemanshu Bhatt | 2003-02-18 |