Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649537 | Intermittent pulsed oxidation process | Steven Reder | 2003-11-18 |
| 6583026 | Process for forming a low k carbon-doped silicon oxide dielectric material on an integrated circuit structure | Derryl D. J. Allman, Ponce Saopraseuth | 2003-06-24 |
| 6574525 | In situ measurement | Steven Reder | 2003-06-03 |
| 6537923 | Process for forming integrated circuit structure with low dielectric constant material between closely spaced apart metal lines | Shafqat Ahmed, Robindranath Banerjee | 2003-03-25 |
| 6521520 | Semiconductor wafer arrangement and method of processing a semiconductor wafer | Charles E. May | 2003-02-18 |