Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656024 | Method and apparatus for reducing compressed dry air usage during chemical mechanical planarization | John M. Boyd, David Wei | 2003-12-02 |
| 6653224 | Methods for fabricating interconnect structures having Low K dielectric properties | Rodney Kistler, Leonid Romm, Te Hua Lin | 2003-11-25 |
| 6585572 | Subaperture chemical mechanical polishing system | Miguel Saldana, John M. Boyd, Aleksander Owczarz | 2003-07-01 |
| 6579157 | Polishing pad ironing system and method for implementing the same | Aleksander Owczarz, Rodney Kistler | 2003-06-17 |
| 6540587 | Infrared end-point detection system | Rodney Kistler | 2003-04-01 |
| 6527870 | Wafer cleaning module and method for cleaning the surface of a substrate | — | 2003-03-04 |
| 6503129 | Activated slurry CMP system and methods for implementing the same | — | 2003-01-07 |