Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6640155 | Chemical mechanical polishing apparatus and methods with central control of polishing pressure applied by polishing head | Damon Vincent Williams | 2003-10-28 |
| 6585572 | Subaperture chemical mechanical polishing system | John M. Boyd, Yehiel Gotkis, Aleksander Owczarz | 2003-07-01 |
| 6579407 | Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system | John M. Boyd, Aleksander Owczarz | 2003-06-17 |
| 6561870 | Adjustable force applying air platen and spindle system, and methods for using the same | Aleksander Owczarz | 2003-05-13 |
| 6520833 | Oscillating fixed abrasive CMP system and methods for implementing the same | Aleksander Owczarz | 2003-02-18 |