Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6585572 | Subaperture chemical mechanical polishing system | Miguel Saldana, John M. Boyd, Yehiel Gotkis | 2003-07-01 |
| 6579157 | Polishing pad ironing system and method for implementing the same | Yehiel Gotkis, Rodney Kistler | 2003-06-17 |
| 6579407 | Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system | John M. Boyd, Miguel Saldana | 2003-06-17 |
| 6561870 | Adjustable force applying air platen and spindle system, and methods for using the same | Miguel Saldana | 2003-05-13 |
| 6520833 | Oscillating fixed abrasive CMP system and methods for implementing the same | Miguel Saldana | 2003-02-18 |