Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653224 | Methods for fabricating interconnect structures having Low K dielectric properties | Yehiel Gotkis, Leonid Romm, Te Hua Lin | 2003-11-25 |
| 6620037 | Chemical mechanical polishing slurry useful for copper substrates | Vlasta Brusic Kaufman, Slumin Wang | 2003-09-16 |
| 6593239 | Chemical mechanical polishing method useful for copper substrates | Vlasta Brusic Kaufman | 2003-07-15 |
| 6579157 | Polishing pad ironing system and method for implementing the same | Yehiel Gotkis, Aleksander Owczarz | 2003-06-17 |
| 6569350 | Chemical mechanical polishing slurry useful for copper substrates | Vlasta Brusic Kaufman, Shumin Wang | 2003-05-27 |
| 6540587 | Infrared end-point detection system | Yehiel Gotkis | 2003-04-01 |