Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646348 | Silane containing polishing composition for CMP | Steven Grumbine | 2003-11-11 |
| 6592776 | Polishing composition for metal CMP | Steven Grumbine, Christopher C. Streinz, Eric W. G. Hoglund | 2003-07-15 |
| 6582623 | CMP composition containing silane modified abrasive particles | Steven Grumbine, Christopher C. Streinz | 2003-06-24 |
| 6569350 | Chemical mechanical polishing slurry useful for copper substrates | Vlasta Brusic Kaufman, Rodney Kistler | 2003-05-27 |
| 6541434 | Cleaning solution for semiconductor surfaces following chemical-mechanical polishing | — | 2003-04-01 |